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STP-200/300/400 Series Instruction Manual
Table 6.4 Safety Functions (1/2)
Abnormality
/Error
Operation state of safety
functions
Lamp indication
REMOTE output
signal
State of the STP pump
Probable causes of an
abnormality/error
Power failure Failure time: approx.
50 msec or more (for
details, see Section 6.1.1,
"Power Failure").
"BATTERY
OPERATION"
"EMERGENCY
OPERATION"
"BATTERY
OPERATION"
"EMERGENCY
OPERATION"
Levitation continues by battery.
The STP pump stops.
The rotor lands on the touch down
bearing at approx. 3000 rpm.
Power failure.
Power cable breakage.
Power cable disconnection
Abnormal
magnetic
bearing
Rotor descends onto the
touch down bearing.
"EMERGENCY
OPERATION"
"EMERGENCY
OPERATION"
The STP pump stops.
STP connection cable breakage.
STP connection cable
disconnection.
Abnormal control circuit.
Excessive
vibration
Rotor vibration:
100 µm O-P or more.
"EMERGENCY
OPERATION"
"EMERGENCY
OPERATION"
The STP pump stops. External vibration, and impact.
Intrusion of atmospheric air.
Intrusion of foreign particles.
Overload of
inverter
Current of more than 7 A
flows into the inverter
momentarily or current of
more than 1.2 A flows into
the inverter continuously
for 30 minutes.
"FAILURE" "FAILURE" The inverter stops.
The STP stops.
Leakage from the vacuum
equipment or piping.
Insufficient pressure at inlet
and outlet port sides.
Failure of starting of the
backing pump.
6-8
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