Sharp R-880D Manual de Instruções descarregar pdf (Página 36)

STP-200/300/400 Series Instruction Manual

3.3 How to Install the STP Pump

Install the STP pump to the vacuum equipment as shown in Figure 3.2.

To Vacuum Equipmemt Control Circuit

Remote Cable

STP Connection Cable

To Power Supply

STP

Control Unit

Inlet Port

Vacuum

Equipment

Power Cable

Auxiliary

Pump

Dry Pump, and other

Ground Cable

Inlet Port Flange

Outlet Port Flange

Vacuum Valve

The STP pump can be

installed through the damper

(optional accessory)

Front

Panel

Figure 3.2 Installation of the STP Pump to the Vacuum Equipment

◇ Chlorine or fluorine system gases can be used in chemical specific

pumps (type C). When you use gases including alkaline metals, but

excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC

Edwards.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system

gases) in the STP-200/STP-300/STP-400 pump or other models

without anti-corrosion treatment (See Section 1.1, "Usable Gases").

◇ When you use the STP pump in a place subjected to exposure to

radiation, contact BOC Edwards.

◇ DO NOT open the STP pump through the flange to atmospheric air

while the STP pump is running.

If atmospheric air flows into the STP pump, it may not function

normally.

◇ Depending upon the type of the backing pump used, atmospheric air

may reverse flow into the STP pump when the backing pump stops.

Attach a vacuum valve to the middle of the piping between the STP

pump outlet port flange and the backing pump, and close the vacuum

valve when the backing pump stops.

3-6

1 2 ... 31 32 33 34 35 36 37 38 39 40 41 ... 129 130

Comentários a estes Manuais

Sem comentários

Sharp R-880D Manual de Instruções Página 36

Comentários a estes Manuais

Manuais e produtos relacionados com Micro-ondas Sharp R-880D