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STP-200/300/400 Series Instruction Manual

INTRODUCTION

Thank you very much for purchasing BOC Edwards’ turbomolecular pump.

The turbomolecular pump is designed to be installed in the vacuum equipment to

exhaust gases from it.

This manual covers all items necessary to ensure safe installation, operation and

maintenance of the following series of the STP-200/STP-300/STP-400

turbomolecular pump:

Model Name Specification

• STP-200 High-vacuum type

• STP-300 High-vacuum type

• STP-400 High-vacuum type

• STP-200C High-vacuum type, chemical specific

• STP-300C High-vacuum type, chemical specific

• STP-400C High-vacuum type, chemical specific

For the specifications of other models, contact BOC Edwards.

In this manual, the above STP pump series is collectively referred to as the "STP

pump."

APPLIED STANDARDS

The STP pump conforms to the following directives and standards:

◇ Applied Directives

• EC Machinery Directive

• EC Electromagnetic Compatibility Directive

• EC Low Voltage Directive

◇ Applied Standards

• EN292-1

• EN292-2

• EN60204-1

• EN55011 (class A)

• EN50082-2

*1 : Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system

gases)

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Sharp R-880D Manual de Instruções Página 7