Sharp R-880D Manual de Instruções descarregar pdf (Página 103)

STP-200/300/400 Series Instruction Manual

12.5 Overhaul

The recommended maintenance intervals for different process applications are

tabulated below:

Process Period Remarks

Metal Etch 1 year Ensure that TMS (Temperature Management

System) is fitted and operational to prevent

accumulation of by-product deposition in the

pump.

Other Etch

Processes

2 years

Etching

It is recommended to change the pump rotor after 5 years due to accumulated wear of

the protective plating material

Other semiconductor

process

2 years Processes resulting in accumulation of deposits in

the pump will require more frequent service.

Clean applications

(Only vacuum pumping)

5 years

Other use (2 years) Dependent on application, contact BOC Edwards

or our local Service office.

◇ The touch down bearing inside the STP pump will be worn out after a

number of full speed touch downs. When the STP control unit

displays "w," it is essential to have the touch down bearings

replaced.

The costs of replacing parts that need to be replaced because of deterioration or

abrasion will be at your own charge.

When overhaul of the STP pump or the STP control unit is needed, contact BOC

Edwards or our local Service office.

“Etching” includes semiconductor etching and LCD etching.

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Sharp R-880D Manual de Instruções Página 103