Sharp R-880D Manual de Instruções descarregar pdf (Página 37)

STP-200/300/400 Series Instruction Manual

◇ The STP pump cannot be used with the outlet port open to

atmospheric air.

Always use the backing pump (dry pump or similar one).

◇ Use a backing pump with a pumping speed of 160 L/min or more for

the STP-200 series, or 240 L/min or more for the STP-300/400 series.

◇ Depending upon the type of the backing pump used, oil vapor may

contaminate the inside of the STP pump. Some oil viscosity could

cause a malfunction when there is a strong reverse flow of oil.

Take the following measures to ensure the correct flow of oil:

• Attach a vacuum valve to the middle of the piping between the STP

pump outlet port flange and the backing pump.

• Attach an absorption trap adjacent to the vacuum valve.

3.3.1 Cleaning the Seal

Inspect the seals of inlet and outlet port flanges for dirt or oil spots before

installing the STP pump in the vacuum equipment.

Take the following measures for cleaning the seals:

• Clean off with a pure gas.

• Wipe with proper solvent (such as alcohol).

◇ A splinter shield is attached to the inlet port flange to prevent foreign

materials from falling into the STP pump.

Always leave the splinter shield attached during operation.

◇ The splinter shield cannot perfectly prevent foreign materials from

falling into the STP pump.

DO NOT install the STP pump in such a manner that foreign materials

can easily fall into it (for example, Si wafers or samples are

positioned above the STP pump). If installing the STP pump in such

a manner, always attach a shield plate with sufficient conductance

above the STP pump to prevent foreign materials from falling into it.

Foreign materials falling into the STP pump through the splinter

shield may result in product damage.

◇ Be careful not to scratch the flange of the STP pump.

Check whether or not there are scratches on the surface, before

installing the STP pump.

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Sharp R-880D Manual de Instruções Página 37