Sharp R-880D Manual de Instruções descarregar pdf (Página 19)

STP-200/300/400 Series Instruction Manual

TABLE OF CONTENTS

SAFETY PRECAUTION

INTRODUCTION

LIMITED WARRANTY

1 Precautions for Safe Operation of the STP Pump.............................................. 1-1

1.1 Usable Gases...................................................................................................................... 1-1

1.2 Maintenance and Inspection Precautions........................................................................... 1-1

1.3 Labels.................................................................................................................................. 1-2

2 Unpacking .......................................................................................................... 2-1

2.1 Unpacking the STP Pump................................................................................................... 2-1

2.2 Unpacking the STP Control Unit ......................................................................................... 2-2

3 Installation of the STP pump .............................................................................. 3-1

3.1 Name and Function of Each Part........................................................................................ 3-1

3.2 Precautions Before Installation ........................................................................................... 3-3

3.2.1 Operating Environment .......................................................................................... 3-3

3.2.2 Installation Area ..................................................................................................... 3-4

3.2.3 Bench .....................................................................................................................3-4

3.3 How to Install the STP Pump .............................................................................................. 3-6

3.3.1 Cleaning the Seal................................................................................................... 3-7

3.3.2 STP Pump Installation Positions............................................................................ 3-8

3.3.3 How to Secure the STP Pump ............................................................................... 3-9

3.3.4 Vacuum Piping ..................................................................................................... 3-13

3.3.5 Connecting the Ground Cable ............................................................................. 3-15

3.3.6 Connecting the Purge Port................................................................................... 3-15

4 Installation of the STP Control Unit .................................................................... 4-1

4.1 Name and Function of Each Part........................................................................................ 4-1

4.1.1 Front Panel............................................................................................................. 4-1

4.1.2 Rear Panel ............................................................................................................. 4-3

4.1.3 Inside of the STP Control Unit ............................................................................... 4-5

4.2 Precautions Before Installation ........................................................................................... 4-7

4.2.1 Operating Environment .......................................................................................... 4-7

4.2.2 Installation Area ..................................................................................................... 4-8

4.3 Attaching the STP Control Unit to a Rack........................................................................... 4-9

4.4 Cable Connection.............................................................................................................. 4-10

4.4.1 Name and Dimensions of Each Cable................................................................. 4-10

4.4.2 How to Connect the Cables ................................................................................. 4-11

5 How to Start/Stop the STP Pump....................................................................... 5-1

5.1 Before Starting .................................................................................................................... 5-1

5.2 Starting/Stopping Time........................................................................................................ 5-1

5.3 Start Procedures ................................................................................................................. 5-2

5.4 Stop Procedures ................................................................................................................. 5-2

5.5 Manual Operation................................................................................................................ 5-3

5.5.1 Powering ON.......................................................................................................... 5-3

5.5.2 Starting the STP Pump .......................................................................................... 5-3

5.5.3 Stopping the STP Pump ........................................................................................ 5-4

5.5.4 Starting the STP Pump after Stopping................................................................... 5-4

5.5.5 Powering OFF ........................................................................................................ 5-5

5.6 Remote Operation............................................................................................................... 5-6

1 2 ... 14 15 16 17 18 19 20 21 22 23 24 ... 129 130

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Sharp R-880D Manual de Instruções Página 19

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