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STP-200/300/400 Series Instruction Manual

Table 15.5 Troubleshooting When any of Abnormality/Error Warning Lamp Lights (1/2)

Procedure

No.

Lamp Being Lit Probable Causes Countermeasures

Referred

Section

No.1 "OVER

TEMPERATURE"

"FAILURE"

"EMERGENCY

OPERATION"

Incorrect connection of

the STP connection cable.

Connect cables correctly.

If the cable connector is not

locked, lock it securely.

4.4.2

Overheat inside the STP

pump:

1) Overheat during

baking.

1) Set the temperature of the

baking heater to 120 °C or

less.

7.1

2) Insufficient cooling. 2) At the time of baking or

gas suction, always cool

the STP pump.

7.2

3) Leakage of the

vacuum piping

system.

3) Check the piping system

for leakage.

3.3.4

No.2 "OVER

TEMPERATURE"

"FAILURE"

4) Repetitious

start/stop

operations.

4) Repetitious start/stop

operations may cause the

STP pump to overheat.

5.2

No.3 "BATTERY

OPERATION"

"EMERGENCY

OPERATION"

Power failure. Check a power failure. 6.1.1

When the rated operation

does not start approx. 30

minutes after start

operation is executed:

When the

ACCELERATION state

continues for approx.

30 minutes:

6.1.4

1) Insufficient pressure

at the inlet port.

1) Use at 1.3

-2

-4

Torr) or less.

3.3.4

16.1

2) Insufficient pressure

at the outlet port.

2) Use at 13 Pa (0.1 Torr) or

less.

3.3.4

16.1

3) Leakage of the

piping system.

3) Check the piping system

for leakage.

3.3.4

No.4 "FAILURE"

4) Failure of the

backing pump.

4) Check the capacity and

start state (Use a pump of

160 L/min or more for

STP-200 or of 240 L/min or

more for STP-300/400).

3.3

16.1

15-6

1 2 ... 109 110 111 112 113 114 115 116 117 118 119 ... 129 130

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