Sharp R-880D Manual de Instruções descarregar pdf (Página 44)

STP-200/300/400 Series Instruction Manual

6) Depending upon the type of the backing pump used, oil vapor may

contaminate the inside of the STP pump. Some oil viscosity could cause a

malfunction when there is a strong reverse flow of oil.

Take the following measures to ensure the correct flow of oil:

• Attach a vacuum valve to the middle of the piping between the STP pump

outlet port flange and the backing pump.

• Attach an absorption trap adjacent to the vacuum valve.

Piping at the Inlet Port Flange

Attach the inlet port to the high vacuum side.

Maximum working pressure:

Pressure at the inlet port flange

applicable continuously

1.3×10

-2

Pa [1×10

-4

Torr]

(for natural air cooled)

Piping at the Outlet Port Flange

Attach the outlet port to the inlet port flange of the backing pump

(primary side pump).

Allowable backing pressure:

Pressure at the outlet port flange

applicable continuously

Pa [0.1

Torr]

(for natural air cooled)

◇ To attain the ultimate pressure shown in Table 16.1,”Specifications

for the STP Pump,” set the pressure at the outlet port flange to

1.3 Pa (10

-2

Torr) or less.

3-14

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Sharp R-880D Manual de Instruções Página 44