Sharp R-880D Manual de Instruções descarregar pdf (Página 31)

STP-200/300/400 Series Instruction Manual

3 Installation of the STP pump

3.1 Name and Function of Each Part

(See Figure 3.1.)

(1) Inlet Port Flange (ICF

, VG

, ISO, and other)

・ Connected to the vacuum equipment (at the high vacuum side).

◇ A splinter shield is attached to the inlet port flange to prevent foreign

materials from falling into the STP pump.

NEVER remove it.

(2) Outlet Port Flange (KF

25)

・ Connected to the inlet port side of the backing pump.

(3) STP Connector (41 pins)

・ Connected to the STP connection cable.

(4) Ground Terminal

・ Used for grounding.

Connect the ground cable between this terminal and the ground

terminal of the STP control unit.

The ground terminal is marked with

label.

(5) Purge Port (KF

10) (Chemical Specific Pump Type C)

・ Introduces a purge gas.

This port is attached only to the chemical specific pump (type C).

In order to protect the inside of the STP pump when pumping

reactive or corrosive gases.

The STP pump is delivered with a blank flange attached to this

port.

: JVIS

: JIS

3-1

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Sharp R-880D Manual de Instruções Página 31