Sharp R-880D Manual de Instruções Página 1

B706-49-880 Issue D Manor Royal, Crawley, West Sussex, RH10 2LW, UK Telephone: +44(0)1293 528844 Fax: +44(0)1293 533453 http://www.bocedwards.com

STP-200/300/400 Series Instruction Manual 813) Deterioration in the basic performance due to the use of the product beyond limits of the use; 14)

STP-200/300/400 Series Instruction Manual 12 Maintenance and Inspection ◇ Stop the STP pump, and turn OFF the primary power (Switch the breaker &qu

STP-200/300/400 Series Instruction Manual 12.3 Replacing the Fuses ◇ Remove the probable causes of the blown fuse before replacing the fuse. ◇ Alw

STP-200/300/400 Series Instruction Manual 12.4 Inspecting for Deposit ◇ When inspecting for deposit, exhaust gases inside the STP pump thoroughly.

STP-200/300/400 Series Instruction Manual 12.5 Overhaul The recommended maintenance intervals for different process applications are tabulated below:

STP-200/300/400 Series Instruction Manual 12.6 Transporting for Repair or Overhaul ◇ When removing the STP pump from the vacuum equipment, exhaust

STP-200/300/400 Series Instruction Manual 13 Storage 13.1 The STP Pump When the STP pump is left unused over the specified period (more than a few mo

STP-200/300/400 Series Instruction Manual 13.2 The STP Control Unit If the STP control unit (including cables) is not used for a long period (more

STP-200/300/400 Series Instruction Manual 14 Disposal 14.1 The STP Pump Dispose of the STP pump as industrial waste according to the guidelines give

STP-200/300/400 Series Instruction Manual 14.3 The Battery Dispose of or collect worn-out batteries in accordance with the guidelines given by each na

STP-200/300/400 Series Instruction Manual 15 Troubleshooting If an abnormality/error is found when using the STP pump, check it and take measures in a

STP-200/300/400 Series Instruction Manual SAFETY PRECAUTIONS The Safety Precautions in this Manual constitute guidelines to protect operators, the STP

STP-200/300/400 Series Instruction Manual 15.2 Abnormalities When Powering ON (When any "Abnormality/Error Warning" lamp lights, see Sectio

STP-200/300/400 Series Instruction Manual 15.4 Abnormalities While the STP Pump Is Rotating (When any "Abnormality/Error Warning" lamp ligh

STP-200/300/400 Series Instruction Manual Table 15.3 Troubleshooting While the STP Pump Is Rotating (2/2) No. Symptom Probable Causes Countermeas

STP-200/300/400 Series Instruction Manual 15.5 When any Abnormality/Error Warning Lamp Lights When any Abnormality/Error Warning lamp lights, check w

STP-200/300/400 Series Instruction Manual Table 15.5 Troubleshooting When any of Abnormality/Error Warning Lamp Lights (1/2) Procedure No. Lamp Bei

STP-200/300/400 Series Instruction Manual Table 15.5 Troubleshooting When any of Abnormality/Error Warning Lamp Lights (2/2) Procedure No. Lamp Bei

STP-200/300/400 Series Instruction Manual 16 Specifications and Accessories 16.1 Specifications for the STP Pump Table 16.1 Specifications for th

STP-200/300/400 Series Instruction Manual 16.2 Specifications for the STP Control Unit Table 16.2 Specifications for the STP Control Unit (1/2) It

STP-200/300/400 Series Instruction Manual Table 16.2 Specifications for the STP Control Unit (2/2) Item Specifications Input/output terminal • AC P

STP-200/300/400 Series Instruction Manual 16.3 Accessories Table 16.3 Accessories Item Q'ty Remarks STP control unit 1 Power cable*1 1 W

STP-200/300/400 Series Instruction Manual ◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to the specified meth

STP-200/300/400 Series Instruction Manual 16.4 Recommended Spare Parts Table 16.5 Recommended Spare Parts Item Model and Manufacturer Specificat

STP-200/300/400 Series Instruction Manual Figure 16.1 External Appearance of the STP Pump (without Anti-Corrosion Treatment) (Example: STP-400)Unit :

STP-200/300/400 Series Instruction Manual 81501825φ146φ180φ140MIN 240Ａ45ﾟ108φ160101110ＤＣＡφＢPurge port KF*110ＡＢＣＤICF*2152VG*1100ISO100ICF*2203VG*1150IS

STP-200/300/400 Series Instruction Manual Figure 16.3 External Appearance of the STP Control UnitUnit : mm*1:JIS508304404703430482.633.341633.31968.13

STP-200/300/400 Series Instruction Manual Figure 16.5 Label Affixing Positions for the STP Control Unit200V 220V240VSTP-No.LENGTH MTURBOMOLECULAR PUMP

STP-200/300/400 Series Instruction Manual This lavel is attachedto the heater.Baking HeaterAir Cooling UnitAIR COOLING UNITVOLTS AC VSEIKO SEIKIMADE

UNIT CONVERSION TABLE Length m cm mm inch 1 100 1.00x103 39.4 0.01 1 10.0 0.394 1x10-3 0.10 1 39.4x10-3 25.4x10-3 2.54 25.4 1 Weight g kg lb. 1 1.0

For more information, contact to the nearest Service Office. Manufacture: BOC Edwards Japan Limited 2-4-1, Shibakoen, Minato-ku, Tokyo 105-0011 JA

Return of BOC Edwards Equipment - ProcedureForm HS1INTRODUCTIONBefore returning your equipment, you must warn BOC Edwards if substances you used (and

Return of BOC Edwards Equipment - DeclarationForm HS2You must:• Know about all of the substances which have been used and produced in the equipment be

STP-200/300/400 Series Instruction Manual ◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may corrode the

UNITED KINGDOMCORPORATE HEADQUARTERSBOC EDWARDS Manor RoyalCrawleyWest Sussex RH10 9LWTel +(44) 1293 528844Fax +(44) 1293 533453BOC EDWARDSWingates I

STP-200/300/400 Series Instruction Manual STP-200/300/400 Series Instruction Manual 4 STP-200/300/400Series ◇ Use the STP connection cable that has

STP-200/300/400 Series Instruction Manual INTRODUCTION Thank you very much for purchasing BOC Edwards’ turbomolecular pump. The turbomolecular pum

STP-200/300/400 Series Instruction Manual PRECAUTIONS 1) No part of this manual may be reproduced in any form by any means without prior written perm

STP-200/300/400 Series Instruction Manual LIMITED WARRANTY This WARRANTY applies to the customer to whom BOC Edwards has delivered this product. 1. WA

STP-200/300/400 Series Instruction Manual 813) Deterioration in the basic performance due to the use of the product beyond limits of the use; 14)

STP-200/300/400 Series Instruction Manual TABLE OF CONTENTS SAFETY PRECAUTION INTRODUCTION LIMITED WARRANTY 1 Precautions for Safe Operation of the S

MT-01E-0A3-C BOC Edwards Japan Limited Dec. 2003 Copyright 2003 BOC Edwards Japan Limited. All rights reserved. Printed in Japan. STP-200/300

STP-200/300/400 Series Instruction Manual 5.6.1 Powering ON...

STP-200/300/400 Series Instruction Manual 14 Disposal ...

STP-200/300/400 Series Instruction Manual TABLES Table 3.1 Tightening torque of bolt...

STP-200/300/400 Series Instruction Manual FIGURES Figure 3.1 Configuration of the STP Pump...

STP-200/300/400 Series Instruction Manual 1 Precautions for Safe Operation of the STP Pump 1.1 Usable Gases Chlorine or fluorine system gases can be

STP-200/300/400 Series Instruction Manual 1.3 Labels The following labels are affixed to the STP pump and STP control unit. Read the contents of the l

STP-200/300/400 Series Instruction Manual 4) STP Pump Installation Warning Label This label describes installation of the STP pump. Install the

STP-200/300/400 Series Instruction Manual 7) High Voltage Device Caution Label The STP control unit is equipped with a high voltage device. This

STP-200/300/400 Series Instruction Manual 1-510) Voltage Rating Label This label describes the rated voltage of the STP control unit. Use voltage spe

STP-200/300/400 Series Instruction Manual 2 Unpacking 2.1 Unpacking the STP Pump Check the following before unpacking the STP pump. 1) Check the pa

STP-200/300/400 Series Instruction Manual SAFETY PRECAUTIONS The Safety Precautions in this Manual constitute guidelines to protect operators, the STP

STP-200/300/400 Series Instruction Manual 2.2 Unpacking the STP Control Unit Check the following before unpacking the STP control unit. 1) Check th

STP-200/300/400 Series Instruction Manual 3 Installation of the STP pump 3.1 Name and Function of Each Part (See Figure 3.1.) (1) Inlet Port Flang

STP-200/300/400 Series Instruction Manual (2)Outlet Port Flange(4) Ground Terminal(5) Purge PortChemical SpecificType C Only(3) STP Connector(1) Inle

STP-200/300/400 Series Instruction Manual 3.2 Precautions Before Installation 3.2.1 Operating Environment ◇ Chlorine or fluorine system gases can b

STP-200/300/400 Series Instruction Manual 3.2.2 Installation Area Leave enough space for the following in addition to that for the STP pump: • Space

STP-200/300/400 Series Instruction Manual ◇ The screw hole for leg for securing the STP pump is M8*1, and the depth is 16 mm (4 positions). For

STP-200/300/400 Series Instruction Manual 3.3 How to Install the STP Pump Install the STP pump to the vacuum equipment as shown in Figure 3.2. To Va

STP-200/300/400 Series Instruction Manual ◇ The STP pump cannot be used with the outlet port open to atmospheric air. Always use the backing pump

STP-200/300/400 Series Instruction Manual 3.3.2 STP Pump Installation Positions The STP pump can be installed vertically, horizontally, upside-down a

STP-200/300/400 Series Instruction Manual 3.3.3 How to Secure the STP Pump ◇ The STP pump is provided with a high-speed rotor. The worst-case fa

STP-200/300/400 Series Instruction Manual ◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to the specified meth

STP-200/300/400 Series Instruction Manual 1) When securing the inlet port with bolts Refer to Table 3.2 for torque in pump abnormality and recommende

STP-200/300/400 Series Instruction Manual 2) When securing the inlet port flange with claw clamps Refer to Table 3.2 for rotational torque. When sec

STP-200/300/400 Series Instruction Manual 3) When installing the damper in the inlet port flange Refer to Table 3.2 for rotational torque. In case of

STP-200/300/400 Series Instruction Manual 3.3.4 Vacuum Piping ◇ DO NOT open the STP pump through the flange to atmospheric air while the STP pump is

STP-200/300/400 Series Instruction Manual 6) Depending upon the type of the backing pump used, oil vapor may contaminate the inside of the STP pump

STP-200/300/400 Series Instruction Manual 3.3.5 Connecting the Ground Cable Connect the ground cable (yellow/green) between the ground terminal of th

STP-200/300/400 Series Instruction Manual 4 Installation of the STP Control Unit 4.1 Name and Function of Each Part 4.1.1 Front Panel (See Figure 4.

STP-200/300/400 Series Instruction Manual (8) "FAILURE" Lamp (red LED) ・ Lights when any of the following abnormalities occurs: a) When t

STP-200/300/400 Series Instruction Manual 4.1.2 Rear Panel (See Figure 4.2.) (11) AC POWER Connector (CON30) ・ For primary power input. (12) MAIN PO

STP-200/300/400 Series Instruction Manual (15)(16)(11)(12)(13)(14)(18)(17) Figure 4.2 STP Control Unit Rear Panel 4-4

STP-200/300/400 Series Instruction Manual ◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may corrode the

STP-200/300/400 Series Instruction Manual 4.1.3 Inside of the STP Control Unit (See Figure 4.3.) (19) Fuses 2 to 5 ・ These fuses protect as follows:

STP-200/300/400 Series Instruction Manual (23)(22)(19) (20)(21) Figure 4.3 Inside of the STP Control Unit 4-6

STP-200/300/400 Series Instruction Manual 4.2 Precautions Before Installation 4.2.1 Operating Environment Install the STP control unit in a place mee

STP-200/300/400 Series Instruction Manual 4.2.2 Installation Area Leave enough space for the following in addition to that for the STP control unit (S

STP-200/300/400 Series Instruction Manual 4.3 Attaching the STP Control Unit to a Rack The dimensions of the STP control unit front panel conform to

STP-200/300/400 Series Instruction Manual 4.4 Cable Connection 4.4.1 Name and Dimensions of Each Cable (unit : mm) STP Control Unit SideSTP Pump Side

STP-200/300/400 Series Instruction Manual 4.4.2 How to Connect the Cables ◇ When connecting/disconnecting cables, always power OFF the STP pump (Sw

STP-200/300/400 Series Instruction Manual 2) Connecting the STP Connection Cable Connect the receptacle side of the STP connection cable to the STP

STP-200/300/400 Series Instruction Manual 3) Connecting the Power (Primary Side) Cable Connect the primary power cable to the "AC POWER CON30&q

STP-200/300/400 Series Instruction Manual Cable Fitting ToolPower Cable ConnectorSecure with two screws (M3*1)STP Control Unit (Top View)STP Control U

STP-200/300/400 Series Instruction Manual STP-200/300/400 Series Instruction Manual 4 STP-200/300/400Series ◇ Use the STP connection cable that has

STP-200/300/400 Series Instruction Manual 5 How to Start/Stop the STP Pump ◇ NEVER connect or disconnect any cables while the power is ON. ◇ NEVER

STP-200/300/400 Series Instruction Manual 5.3 Start Procedures Start the backing pump before or simultaneously with start of the STP pump. Open the va

STP-200/300/400 Series Instruction Manual There are two methods of operating the STP pump: MANUAL and REMOTE. Select one which fits your vacuum equi

STP-200/300/400 Series Instruction Manual 5.5.3 Stopping the STP Pump 1) Press the "MOTOR STOP" switch on the front panel to stop the STP

STP-200/300/400 Series Instruction Manual 5.5.5 Powering OFF 1) When both the "ACCELERATION" and "NORMAL OPERATION" lamps are of

STP-200/300/400 Series Instruction Manual 5.6 Remote Operation (Read through Section 8, "Remote Input/Output Signal Connector" before use.

STP-200/300/400 Series Instruction Manual 5.6.2 Starting/Stopping the STP Pump Table 5.1 describes how to start or stop the STP pump during remote o

STP-200/300/400 Series Instruction Manual 5.6.4 Powering OFF The POWER OFF signal has priority over the START signal. 1) When both the "ACCELE

STP-200/300/400 Series Instruction Manual 6 Safety Functions When an Abnormality/Error Occurs The STP pump is provided with safety functions for vari

STP-200/300/400 Series Instruction Manual Table 6.1 shows the states of lamps and REMOTE output signals at a power failure. Table 6.1 States of Lam

STP-200/300/400 Series Instruction Manual INTRODUCTION Thank you very much for purchasing BOC Edwards’ turbomolecular pump. The turbomolecular pum

STP-200/300/400 Series Instruction Manual ◇ Establish a sequence so that power can be supplied to the STP control unit immediately after a power rec

STP-200/300/400 Series Instruction Manual Table 6.3 Operations of the STP Pump after a Power Recovery (during REMOTE OPERATION) Remote signal input

STP-200/300/400 Series Instruction Manual 6.1.3 Excessive Vibration When serious vibration or mechanical shock causes the rotor to touch the touch dow

STP-200/300/400 Series Instruction Manual 6.1.8 Abnormal Battery Voltage When the battery voltage is 21 V DC or less due to deterioration in the batt

STP-200/300/400 Series Instruction Manual 6.2 Restarting after Any Safety Function Operates 1) In case of a power failure: Establish a sequence so th

STP-200/300/400 Series Instruction Manual Table 6.4 Safety Functions (1/2) Abnormality /Error Operation state of safety functions Lamp indication R

STP-200/300/400 Series Instruction Manual Table 6.4 Safety Functions (2/2) Abnormality /Error Operation state of safety functions Lamp indication

STP-200/300/400 Series Instruction Manual 7 Baking, Cooling and Gas Suction of the STP Pump 7.1 Baking the STP Pump To attain a lower pressure in a

STP-200/300/400 Series Instruction Manual 7.1.1 Attaching a Baking Heater 1) Attach a baking heater (optional accessory) as near as possible to th

STP-200/300/400 Series Instruction Manual 7.2 Cooling the STP Pump (See Figure 7.1.) There is a method using an air cooling unit. When performing

STP-200/300/400 Series Instruction Manual PRECAUTIONS 1) No part of this manual may be reproduced in any form by any means without prior written perm

STP-200/300/400 Series Instruction Manual 7.3 Gas Suction ◇ When pumping gases, they may remain in the STP pump. Introduce a purge gas and then e

STP-200/300/400 Series Instruction Manual Air Cooling Unit(Optional Accessory)Used for air coolingThis label is attachedto the baking heater.Baking

STP-200/300/400 Series Instruction Manual 8 Remote Input/Output Signal Connector The remote input/output signal connector (REMOTE CONNECTOR CON40) is

STP-200/300/400 Series Instruction Manual －＋－＋－＋－(1)(13)(2)POWER ONPOWER OFFMOTOR STARTMOTOR STOPREMOTE CONNECTOR :Remote Input/Output Signal Connect

STP-200/300/400 Series Instruction Manual 8.2 Remote Output Signals Remote output signals function during MANUAL or REMOTE operation. Use output sign

STP-200/300/400 Series Instruction Manual N.O : Normal OpenN.C : Normal CloseREMOTEN.O OUTPOWERN.O OUTN.O OUTFAILUREN.O OUTN.O OUTN.O OUTACCELERATIONN

STP-200/300/400 Series Instruction Manual Table 8.3 shows the rated contacts for switch SW1 (See Figure 8.2). Table 8.3 Rated Contacts for Switch

STP-200/300/400 Series Instruction Manual 8.3 Remote Cables (Optional Accessories) 8.3 Remote Cables (Optional Accessories) Remote cables are provid

STP-200/300/400 Series Instruction Manual 9 Internal Battery Two batteries (PORTALAC Series Small-Sized Sealed Lead-Acid Batteries, PE12V 7F1 : 12 V,

STP-200/300/400 Series Instruction Manual 10543210.510 20 30 40Ambient Temperatures (℃)Life of the Internal Battery (Year)405２Allowable Shelf Life of

STP-200/300/400 Series Instruction Manual LIMITED WARRANTY This WARRANTY applies to the customer to whom BOC Edwards has delivered this product. 1. WA

STP-200/300/400 Series Instruction Manual 9.4 How to Replace the Internal Battery ◇ Turn OFF the primary power (Switch the breaker "OFF")

STP-200/300/400 Series Instruction Manual 9.4.1 How to Replace the Battery Case 1) Stop the STP pump, and turn OFF the primary power (Switch the br

STP-200/300/400 Series Instruction Manual (1) STP Control Unit Front Panel (2) Internal Battery Connector (3) Battery Case Screw (4) Battery Case

STP-200/300/400 Series Instruction Manual 9.5 How to Dispose of the Internal Battery Dispose of or collect worn-out batteries in accordance with the

STP-200/300/400 Series Instruction Manual 10 External Battery ◇ DO NOT use (an) external batteries when internal batteries are inserted. Failure

STP-200/300/400 Series Instruction Manual 10.1 Specifications for the External Battery When you use external batteries, select one in accordance with

STP-200/300/400 Series Instruction Manual 10.2 Installation of the External Battery ◇ Turn OFF the primary power (Switch the breaker "OFF"

STP-200/300/400 Series Instruction Manual 10.3 How to Charge the External Battery The STP control unit is equipped with a constant voltage (27.3 V) c

STP-200/300/400 Series Instruction Manual 11 Operation Principle of the STP Pump (See Figure 11.1.) The STP-200/300/400 is a series of magnetically

STP-200/300/400 Series Instruction Manual (1) Rotor blade(2)Stator blade(3) Radial sensor(4) Radial electromagnet(5)Axial sensor(6)Axial electromagne