Sharp R-880D Manual de Instruções descarregar pdf (Página 43)

STP-200/300/400 Series Instruction Manual

3.3.4 Vacuum Piping

◇ DO NOT open the STP pump through the flange to atmospheric air

while the STP pump is running.

If atmospheric air flows into the STP pump, it may not function

normally.

◇ Depending upon the type of the backing pump used, atmospheric air

may reverse flow into the STP pump when the backing pump stops.

Attach a vacuum valve to the middle of the piping between the STP

pump outlet port flange and the backing pump, and close the vacuum

valve when the backing pump stops.

In order to let the STP pump bring its performance into full play, follow the

precautions below:

1) Be careful not to scratch the flange of the STP pump.

Before installing the STP pump, check whether or not there are scratches on

the surface.

2) Use steel or aluminum tubes with a low gas loss to connect the vacuum

equipment to the STP pump.

3) Take measures for minimizing leakage. It is also necessary to degrease the

tubes as regularly as possible to keep the gas loss as low as possible.

4) It is recommended to use a backing pump of pumping speed 160 L/min or

more for the STP-200 series, or pumping speed 240 L/min or more for the

STP-300/400 series.

However, the pressure at the inlet and outlet ports varies with the flow rate

of gas, capacity of the vacuum equipment, length and material of the piping.

Select a backing pump in accordance with the capacity and starting method

(simultaneous starting, starting after generating roughing vacuum) suitable

for the vacuum equipment you use.

5) Connect the STP pump and the backing pump using stainless steel or

aluminum alloy tubing, flexible tubing, vacuum rubber or Teflon tubing, and

other.

The following measures can be used to avoid the transmission of the vibration

of the backing pump to the STP pump and the vacuum equipment.

• DO NOT place the backing pump on the same floor as the vacuum

equipment.

• Locate the backing pump on a vibration-proof table.

Attain 1/3 or less of the rotational speed of the backing pump, when

adjusting the inherent frequency of the backing pump installed on a

vibration-proof table.

• Attach a weight to the piping from the backing pump, or secure the piping

to a rigid, heavy object free of vibration.

• Use a tube of high flexibility.

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