Sharp R-880F Manual de Instruções descarregar pdf (Página 6)

EXT Split Flow Compound Turbomolecular Pumps

PAGE

Issue F ii Mar 07

7 SERVICE, SPARES AND ACCESSORIES 29

7.1 Introduction 29

7.2 Service 29

7.3 Spares 29

7.3.1 ISX Inlet-Screens 29

7.3.2 Inlet-strainer (interstage pumps only) 29

7.3.3 Inlet-flange seals 30

7.4 Accessories 30

7.4.1 Installation 30

7.4.2 EXDC Drive Modules 30

7.4.3 EXC Controllers 30

7.4.4 Pump-to-controller cables 31

7.4.5 EXT Water cooling block assembly 31

7.4.6 TAV Vent-valve and vent-port adaptor 31

7.4.7 ACX Air-Cooler 31

7.4.8 VRX Vent-restrictor 32

INDEX 33

ILLUSTRATIONS

Figure Page

1 Dimensions of the EXT 200/200H Split Flow Pump system (units in mm) 7

2 Dimensions of the EXT 200/200H GCMS Split Flow Pump system (units in mm) 8

3 Dimensions of the EXT 200/200H ICPMS Split Flow Pump system (units in mm) 9

4 Dimensions of the EXT 200/200H GCMS/LCMS (reversed body) 10

5 A typical vacuum system using a Turbomolecular pump 12

6 Correct installation of inlet screen 14

7 Mounting attitude range of an EXT Split Flow Pump 15

8 Installation of optional accessories 32

1 2 3 4 5 6 7 8 9 10 11 ... 41 42

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Sharp R-880F Manual de Instruções Página 6