Sharp R-880F Manual de Instruções descarregar pdf (Página 31)

EXT Split Flow Compound Turbomolecular Pumps

MAINTENANCE

PAGE

Mar 07 23 Issue F

Symptom Check Action

The impeller does not rotate. After

pressing start - Fail LED not lit.

Is the EXC Controller power LED lit? If not, check that the electrical supply is

on, check that the switch at the rear of

the EXC Controller is on, check the

fuse in the rear of the EXC Controller.

If all of the above are OK then the EXC

Controller is faulty. Consult

BOC Edwards or your supplier.

Is the EXC Controller Start/Stop LED

flashing?

If so, check that the correct links are

made on the EXC Controller logic

interface (refer to the instruction

manual supplied with the EXC

Controller).

Check that any system interlocks are

correctly made (refer to the instruction

manual supplied with the EXC

Controller).

Check that the pump-to-controller lead

is connected.

If you have made all of the above checks

and cannot identify the cause of the

fault, consult BOC Edwards or your

supplier.

Is the EXC Controller first speed

indication LED lit?

If not, the EXC Controller is faulty. If lit,

then the EXT Split Flow Pump is faulty.

Consult BOC Edwards or your supplier.

The EXC Controller trips into Fail - at

any speed.

Are the system interlocks correctly

connected?

Ensure that the system interlocks do

not open after the EXT Split Flow Pump

has started.

The EXC Controller trips into Fail

during the ramp-up and before 50%

speed is reached.

Is the inlet pressure too high? Is the

backing pressure too high?

If so, reduce the pumping load, or check

for a gross leak into the system.

Is the EXT Split Flow Pump running too

hot?

Increase the cooling-water flow or

decrease the water temperature or do

both. You may need to add air-cooling

to water-cooling. (Refer to Section 3

for maximum inlet pressure and cooling

requirements). Check that external

heat sources (such as system bakeout

heaters) are not excessive.

Does the rotor rotate freely? If not, the EXT Split Flow Pump bearings

are damaged. Consult BOC Edwards or

your supplier.

Table 7 - Fault finding

1 2 ... 26 27 28 29 30 31 32 33 34 35 36 ... 41 42

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