Sharp R-880F Manual de Instruções descarregar pdf (Página 11)

EXT Split Flow Compound Turbomolecular Pumps

TECHNICAL DATA

PAGE

Mar 07 3 Issue F

2 TECHNICAL DATA

2.1 General

2.2 Pumping media

Note: Concentrations of gases may be modified by the compression of the pump.

The pumps are designed to pump the following residual gases normally used in high-vacuum systems:

Performance See Table 4

Dimensions See Figures 1, 2, 3 and 4

Maximum inlet-flange temperature 70

Maximum magnetic field 3.5 mT Horizontal field

Installation category EN61010 part 1, Category 1

Pollution degree EN61010 part 1, Category 2

Table 1 - General

WARNING

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.

WARNING

Do not use Split Flow Pumps to pump explosive gas mixtures as the pumps are not

suitable for this purpose.

WARNING

If pyrophoric gases are pumped then the customer must supply adequate dilution with an

inert gas.

WARNING

If pumping hazardous gases or vapours, the customer must observe the safety

recommendations of the supplier of the gas or vapour.

CAUTION

Do not use an EXT Split Flow Pump to pump gases containing more than 20% oxygen. If you do, the

lubricant will polymerise and the pump will fail prematurely.

•Air •Nitrogen •Helium

• Carbon monoxide • Krypton • Hydrogen

•Neon •Argon •Butane

• Ethane • Propane

• Methane • Carbon dioxide

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Sharp R-880F Manual de Instruções Página 11